|System and Circuit Design for a Capacitive MEMS Gyroscope||Thesis||
Description: This 279 page PhD Thesis from the Helsinki University of Technology discusses 1 and 2 degree of freedom resonators, the Coriolis Effect, mechanical-thermal noise, and bulk and surface micromachining. It reviews a number of published microgyroscopes, discusses synchronous demodulation, resonator excitation, capacitive readout and more.
Author(s): Saukoski, Mikko
URL: http://lib.tkk.fi/ Diss/ 2008/ isbn9789512292974/
Keywords: sensors , MEMS , angular rate sensor , gyro , Coriolis Effect , bulk micromachining , surface micromachining
Submitter: EE HomePage Editorial Staff
xml_ID: 1218426001 (single entry page)
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