|Handbook of Semiconductor Silicon Technology||Book||
Description: This text focuses on fabrication techniques for the semiconductor business. If you want to know more about vapor deposition, preparation of polysilicon, crystal growth of silicon, lapping, polishing, etc., then this is the text for you. Things have surely changed since this book was published in 1990, but it is probably of interest from an historical perspective anyway.
Format: Paper, PDF
Price: appears to be free online
URL: http://www.freebookspot.org/ Comments.aspx? Element_ID=12376
Limitations: This appears to be a scanned version of the original text.
Keywords: manufacturing , chemical vapor deposition , epitaxy , etching , photoresist , wafer processing , silicon , defects , carrier lifetimes
Submitter: EE HomePage Editorial Staff
xml_ID: 1233109525 (single entry page)
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