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"chemical vapor deposition" references for the Electrical Engineer
Entries 1 through 2 of 2 were returned.
Name Type Details
The Beginner's Guide to MEMS Processing Tutorial Description: The intro begins: "This guide is intended for people new to microelectromechanical systems (MEMS) technology. It gives a brief overview of the technology and some of the methods used to create microstructures."
Handbook of Semiconductor Silicon Technology Book Description: This text focuses on fabrication techniques for the semiconductor business. If you want to know more about vapor deposition, preparation of polysilicon, crystal growth of silicon, lapping, polishing, etc., then this is the text for you. Things have surely changed since this book was published in 1990, but it is probably of interest from an historical perspective anyway.

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