|Design And Analysis Of MEMS Angular Rate Sensors||Thesis||
Description: This 81 page Master's thesis from the Indian Institute of Science (2006) discusses different MEMS gyro designs (two for out-of-plane motion, and two for in-plane motion), damping mechanisms, equivalent lumped parameter models and simulated results.
Author(s): Pratap, Rudra & Patil, Nishad
URL: http://etd.ncsi.iisc.ernet.in/ handle/ 2005/ 291
Keywords: MEMS , Simulink , angular rate sensor , vibratory gyroscope , gyro , damping , turning fork gyroscope , electrostatic comb-drive actuator
Submitter: EE HomePage Editorial Staff
xml_ID: 1217779865 (single entry page)
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