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Entries 1 through 1 of 1 were returned.
Name EntryDate Details
Testing Written Very Small 2007-03-18 10:33:42 Description: Evaluation Engineering Magazine article discusses techniques used to test MEMS devices.
Author(s): Lecklider, Tom
License: Commercial
Type: Article
Format: PDF
Price: Free
URL: http://www.evaluationengineering.com/ archive/ articles/ 0906/ 0906testing_written.asp
ReviewText: 7 page article discusses techniques and equipment used to verify MEMS structures and operation. We especially like the tutorial on confocal microscopy.
Keywords: MEMS , profilometry , Laser-Doppler vibrometry , confocal scanning microscopy , interferometry , interference fringe counting , wafer level test , scanning microscopy
Submitter: EE HomePage Editorial Staff
Affiliation: None
xml_ID: 1174239222 (single entry page)