| Name | EntryDate | Details |
| Testing Written Very Small | 2007-03-18 10:33:42 |
Description: Evaluation Engineering Magazine article discusses techniques used to test MEMS devices. Author(s): Lecklider, Tom License: Commercial Type: Article Format: PDF Price: Free URL: http://www.evaluationengineering.com/ archive/ articles/ 0906/ 0906testing_written.asp ReviewText: 7 page article discusses techniques and equipment used to verify MEMS structures and operation. We especially like the tutorial on confocal microscopy. Keywords: MEMS , profilometry , Laser-Doppler vibrometry , confocal scanning microscopy , interferometry , interference fringe counting , wafer level test , scanning microscopy Submitter: EE HomePage Editorial Staff Affiliation: None xml_ID: 1174239222 (single entry page) |