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Specific Reference Information
Entries 1 through 1 of 1 were returned.
|System and Circuit Design for a Capacitive MEMS Gyroscope
Description: This 279 page PhD Thesis from the Helsinki University of Technology discusses 1 and 2 degree of freedom resonators, the Coriolis Effect, mechanical-thermal noise, and bulk and surface micromachining. It reviews a number of published microgyroscopes, discusses synchronous demodulation, resonator excitation, capacitive readout and more. |
Author(s): Saukoski, Mikko
URL: http://lib.tkk.fi/ Diss/ 2008/ isbn9789512292974/
, angular rate sensor
, Coriolis Effect
, bulk micromachining
, surface micromachining
Submitter: EE HomePage Editorial Staff
xml_ID: 1218426001 (single entry page)