|A (not so) short introduction to MEMS||2010-06-26 15:03:44||
Description: "A one chapter description of MEMS technology that can be used by beginers or as course document for introductory MEMS class." |
Author(s): Chollet, Franck & Liu, Haobing
License: Some Restrictions (includes GNU)
URL: http://memscyclopedia.org/ Document/ introMEMS.pdf
Limitations: "Free to use, reuse or modify, but copyright is retained by the original authors and their use need to be acknowledged. Moreover the documents can not be used commercially without the copyright owner consent."
ReviewText: 135 pages. Covers MEMS fabrication, system partitioning, structures, packaging, assembly and test.
Keywords: sensors , Actuators , MEMS , packaging , capacitive sensing , DRIE , micromachining , piezoresistive sensing
Submitter: EE HomePage Editorial Staff
xml_ID: 1277579024 (single entry page)