| Name | EntryDate | Details |
| MEMS Accelerometers | 2008-08-10 23:46:34 |
Description: This is a nice, 17 page, introduction to MEMS accelerometers. It starts with a basic introduction to MEMS, moves on to capacitive plate sensing and demodulation, sensor noise characteristics, applications and MEMS fabrication.
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Author(s): Andrejasic, Matej License: Unknown Type: Tutorial Format: PDF Price: Free URL: http://mafija.fmf.uni-lj.si/ seminar/ files/ 2007_2008/ MEMS_accelerometers-koncna.pdf ReviewText: A very nice, well illustrated, and brief introduction. Keywords: sensors , MEMS , accelerometers , capacitive sensing Submitter: EE HomePage Editorial Staff Affiliation: None xml_ID: 1218426394 (single entry page) |
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