| Name | EntryDate | Details |
| System and Circuit Design for a Capacitive MEMS Gyroscope | 2008-08-10 23:40:01 |
Description: This 279 page PhD Thesis from the Helsinki University of Technology discusses 1 and 2 degree of freedom resonators, the Coriolis Effect, mechanical-thermal noise, and bulk and surface micromachining. It reviews a number of published microgyroscopes, discusses synchronous demodulation, resonator excitation, capacitive readout and more.
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Author(s): Saukoski, Mikko License: Unknown Type: Thesis Format: PDF Price: Free URL: http://lib.tkk.fi/ Diss/ 2008/ isbn9789512292974/ Keywords: sensors , MEMS , angular rate sensor , gyro , Coriolis Effect , bulk micromachining , surface micromachining Submitter: EE HomePage Editorial Staff Affiliation: None xml_ID: 1218426001 (single entry page) |
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